Ibipimo bya tekiniki
Ibigize | Ibirimo | URUBANZA No. |
Amazi meza | 85-90% | 7732-18-5 |
Sodium benzoate | 0.1-0.2% | 532-32-1 |
Surfactant | 4-5% | ∕ |
Abandi | 4-5% | ∕ |
Ibiranga ibicuruzwa
1 level Urwego rwo hejuru rwo kurengera ibidukikije: Gutoranya guhitamo birashobora kugerwaho udakoresheje ibishingwe kama nka TMAH.
2 cost Igiciro gito cy'umusaruro: Ukoresheje NaOH / KOH nk'amazi ya etching, igiciro kiri hasi cyane ugereranije na acide ya acide na etching.
3 efficient Gukora neza cyane: Ugereranije na acide ya acide na etching, imikorere ya bateri yiyongereyeho hejuru ya 0.15%.
Ibicuruzwa
1 、 Iki gicuruzwa muri rusange gikwiranye na bateri ya Perc na Topcon;
2 、 Bikwiranye na kristu imwe ya 210, 186, 166, na 158.
Amabwiriza yo gukoresha
1 、 Ongeramo urugero rwa alkali mukigega (1.5-4% ukurikije igipimo cya KOH / NAOH)
2 、 Ongeramo umubare ukwiye wibicuruzwa muri tank (1.0-2% ukurikije igipimo cyijwi)
3 Shyushya amazi ya tank ya polishinge kugeza kuri 60-65 ° C.
4 、 Shyira wafer wa silicon hamwe na PSG yinyuma yakuwe muri tank ya polishing, igihe cyo kwitabira ni 180s-250s
5 、 Basabwe kugabanya ibiro kuruhande: 0.24-0.30g (isoko ya wafer 210, andi masoko yahinduwe muburyo bungana) ingirabuzimafatizo zuba hamwe na polycrystalline PERC
Kwirinda
1 itive Inyongeramusaruro zigomba kubikwa kure yumucyo.
2 、 Iyo umurongo utanga umusaruro udatanga umusaruro, amazi agomba kuzuzwa no gukama buri minota 30.Niba nta musaruro urenze amasaha 2, birasabwa kuvoma no kuzuza amazi.
3 line Gukemura umurongo mushya bisaba igishushanyo cya DOE gishingiye kuri buri nzira yumurongo wibyakozwe kugirango ugere kubikorwa, bityo bikore neza.Inzira isabwa irashobora koherezwa mugukemura.